Silicon-Based MEMS Resonators Offer Accuracy in Little Space
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Atomic Clocks
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Currently quartz crystal-based oscillators are among the most common type of clock source in electronics, providing a reasonably accurate source in a cheap and small package. Unfortunately for high accuracy applications, atomic clocks aren’t quite compact enough to fit into the typical quartz-based temperature-compensated crystal oscillators (TCXOs) and even quartz-based solutions are rather large. The focus therefore has been on developing doped silicon MEMS solutions that can provide a similar low-drift solution as the best compensated quartz crystal oscillators, with the IEEE Spectrum magazine recently covering one such solution.

Part of the DARPA H6 program, [Everestus Ezike] et al. [dev…

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