Design and Fabrication of a Spin Coater with In-Situ Optical Measurement for Soft Thin Films (opens in new tab)

Spin coating is widely used for fabrication of thin polymer and elastomer films, yet reliable thickness verification of highly compliant materials remains challenging due to deformation from contact-based measurements and the cost and complexity of conventional optical metrology. Accurate thickness control is especially critical in soft elastomer applications such as dielectric elastomer actuators (DEAs), where mechanical and functional performa...