Step- and terrace-resolved crystal truncation rod scattering from vicinal surfaces under coherent heteroepitaxy (opens in new tab)

Author(s): Junlin Wu, Erqi Xu, Qihui Lin, Jiaqing Yue, Jiale Wang, Zihao Xu, and Guangxu JuWe develop a general theory of crystal truncation rod (CTR) scattering from vicinal surfaces with a coherently strained heteroepitaxial film. The formalism incorporates film-induced interference fringes, full elastic lattice distortion, terrace ordering, surface reconstruction, and real-time growth …[Phys. Rev. B 113, 235309] Published Tue Jun 16, 2026