Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology (opens in new tab)

As the core sensitive element of high-precision inertial navigation systems, the Q-factor and frequency splitting of the micro hemispherical resonator gyroscope (mHRG) are critical determine the performance of the inertial measurement unit (IMU). However, the continuous films formed by traditional coating processes introduce significant damping, leading to a substantial decrease in the Q-factor and severely restricting the improvement of the mHRG’s accuracy. In this paper, a patterned coating...