High-quality and field resilient microwave resonators on Ge quantum well heterostructures (opens in new tab)

Superconducting resonators integrated with germanium (Ge) quantum wells (QWs) offer a promising platform for hybrid quantum devices. Yet, in the most common heterostructure architectures, they have so far been limited by sizable photon losses. Here, we report the fabrication and characterization of microwave resonators patterned in the aluminum (Al) thin film of an in-situ grown superconductor/semiconductor hybrid heterostructure (HS). The semiconductor part of this hybrid HS is grown on a co...