Impact of boundary conditions and geometric tolerances dynamics on MEMS double touch mode capacitance pressure sensor applying M-shaped silicon design (opens in new tab)

Micro-Electro-Mechanical Systems (MEMS) are extensively utilized in many different applications because of its compact design, low power consumption and greater sensitivity. Compared to piezoresistive alternatives, a MEMS- based Touch Mode Capacitive Pressure Sensor (TMCPS) is designed and simulated to achieve better sensitivity, stability and linearity. This work presents a Double Touch Mode MEMS-based Capacitive Pressure Sensor (DTMCPS) with a flexible circular diaphragm integrated into an ...