A feature-enhanced transformer for point-like micro-defect detection on semiconductor wafer surfaces (opens in new tab)

Semiconductor wafers constitute a critical substrate material for modern information-technology products, and surface defects can directly compromise chip yield and device reliability. In practical industrial settings, wafer defects are typically minute in scale and are characterized by low-contrast detail attenuation, severe background noise, and dense spatial distributions, which collectively hinder the stable extraction of discriminative features by existing visual inspection methods. To t...