ASML, TSMC and imec present 300mm integration route for industry-ready 2D-material-based transistors (opens in new tab)

In partnership with equipment provider Advanced Semiconductor Materials Lithography (ASML) of Veldhoven, The Netherlands and foundry Taiwan Semiconductor Manufacturing Corp (TSMC), nanoelectronics research center imec of Leuven, Belgium has presented a novel, robust and scalable 300mm integration route for 2D-material-based nFETs and pFETs at the 2026 IEEE/JSAP Symposium on VLSI Technology & Circuits in Honolulu, Hawaii, USA (14–18 June)...