(PR) ASML, TSMC, and imec Achieve 300 mm Integration of 2D-Material Transistors with 50 nm Pitch (opens in new tab)

This week, at the 2026 IEEE/JSAP Symposium on VLSI Technology and Circuits, imec, a world-leading research and innovation hub in advanced semiconductor technologies, in partnership with the lithography solution provider ASML, and semiconductor foundry TSMC, presents a novel, robust and scalable 300 mm integration route for 2D-material based n and pFETs. For the first time, scaled nFETs (implementing MoS2 as the channel material) and pFETs (either WS2 or WSe2-based) with 50 nm contacted poly p...